新型可调谐外腔半导体激光器光频扫描干涉测距的方法-激光制造网.PDF

第47 卷 第5 期 西 安 交 通 大 学 学 报 Vol.47 No.5 2013 年5 月 JOURNAL OF XI’AN JIAOTONG UNIVERSITY May. 2013 新型可调谐外腔半导体激光器光频扫描干涉测距的方法 邓忠文，刘志刚，陶龙，吕涛，令锋超 (西安交通大学机械制造系统国家重点实验室，710049，西安) 摘要：针对光频调谐器件压电陶瓷的形变滞后对测量精度的影响，提出了一种采用局部二次曲线过渡的激光 器驱动信号波形的修正方法。利用扫描法布里-帕罗干涉仪测得的光频率扫描时间，建立了激光器扫频驱动过 程的传递函数模型，采用最小二乘峰值检测法来识别干涉信号的波峰，通过建立的激光器扫频驱动控制传递 函数模型，对激光器光频率非线性输出进行了补偿。实验结果表明，激光扫频驱动信号波形修正方法可消除 干涉信号转折处的波形畸变，而相位测量、激光器输出的补偿方法可将测量系统的重复精度、定位精度提高 约10倍。 关键词：驱动信号 ；相位测量 ；非线性输出 中图分类号：TH 161.21 文献标志码：A 文章编号：0253-987X(2013)05-0000-00 Novel Frequency Scanned Interferometry Absolute Distance Measurement by Tunable External-Cavity Diode Laser DENG Zhongwen，LIU Zhigang，TAO Long，LV Tao，LING Fengchao (State Key Laboratory for Manufacturing Systems Engineering,Xi’an Jiaotong University,Xi’an 710049,China) Abstract: Aiming at the issue of measurement accuracy affected by hystereticPZT deformation in absolute distance measurement system , by tunable external-cavity diode laser frequency scanned interferometry, a modified strategy with driving laser signal waveform of partial quadratic curve transition in time domain, is proposed. By least square peak detection of interference signal,the effect of tuning nonlinearity on the interf erence signal is analyzed. The non-linear system output is compensated by analyzing the transfer function of laser control system. The results indicate that the correction of driving signal effectively improves the wa veform distortion of the interference signal, and the measuring accuracy is increased tenfold with phase measurement and compensation for linear laser output. Keywords ：d