ep,品lj电路板激光投影成像照明系统均匀性分析（Uniformity analysis of LJ EP circuit board laser projection imaging illumination system）.docVIP

ep,品lj电路板激光投影成像照明系统均匀性分析（Uniformity analysis of LJ EP circuit board laser projection imaging illumination system） This article is contributed by keenss1985 Pdf documents may experience poor browsing on the WAP side. It is recommended that you first select TXT, or download the source file to the local view. Volume third, phase twenty-sixth, May 2009 quantum electric Chinese Journal ELECTRONICS V01.26 No.3 CHINESE JOURNAL OF QUANTUM May 2009 DOI:10.3069/j.issn.1007-5461.2009.03.020 Uniformity analysis of lJ Ep circuit board laser projection imaging illumination system Pei Wenyan, golden week, 2 beams are Lin Qinghua: (1 、 experimental teaching department, Guangdong University of Technology), 2 、 School of physics and opto electronic engineering, Guangdong University of Technology, Guangdong, Guangzhou, Guangdong, Guangzhou 510006; 510006) For the XeF excimer laser with 351 nm wavelength, a large area of high precision, high yield and conventional resist was designed The printed circuit board of light (PCB) laser projection imaging lighting system. According to the excimer laser of partially coherent flat topped Gauss beam (PCFGB) model of micro lens array (MLA) are Cambodia diffraction characteristics are analyzed theoretically. By PCFGB distribution function, the diffraction angle and the Fresnel Kirchhoff diffraction integral formula of constant intensity the quantitative analysis of the influence of diffraction effect of MLA beam. The theoretical calculation shows that the micro lens edge multi beam Fresnel diffraction and micro lens interference can cause light amplitude modulation, but the diffraction peak is more evident in the beam edges. At the same time, the PCFGB curves obtained by numerical integral, found 9 x 9 MLA Cambodia device can ensure the uniformity of the beams from individual microlenses superimposed, and minimize the diffraction and multiple beam interference effect. By using a hexagonal diaphragm Method can not only meet the needs of the large-a