纳米级DC薄膜的力学性能研究.docx

本科毕业设计(论文)题目：纳米级DLC膜的力学性能研究院（系）：光电工程学院专业：光电信息工程班级：080111 学生：刘彬彬学号： 080111111指导教师：惠迎雪2012年6月纳米级DLC膜的力学性能研究摘要类金刚石碳 (DLC) 膜，具有高硬度、高耐磨性、低摩擦系数、高热导率、高红外透过率、高化学稳定性等一系列与金刚石膜相似的优异性能。与金刚石膜相比，其具有沉积温度低、沉积面积大、膜面平整光滑、成本低等优点，是一种优良的红外增透保护材料。本文采用非平衡磁控溅射法在单晶硅基底上沉积制备非氢和含氢DLC薄膜，通过改变沉积时间以获取不同厚度的薄膜样品，进而采用纳米压痕仪对薄膜样品的硬度进行测量，分析了薄膜制备工艺对薄膜力学性能的影响，并在此基础上对非氢和含氢DLC薄膜的力学性能进行了分析比较。研究结果表明：对于无氢DLC薄膜，保持其他工艺条件不变，薄膜的几何厚度会随着沉积时间近似成线性增长，但对于含氢的DLC薄膜，除了受到沉积时间的影响，甲烷气体流量比是影响薄膜厚度的重要因素；非氢DLC薄膜的硬度随着其厚度的增大而增高，而含氢DLC并未见相似规律，对于含氢DLC薄膜，其硬度明显受到反应气体流量的影响，随着CH4：Ar气体流量比的增加，薄膜的硬度逐渐减小，总体而言，非氢DLC薄膜的硬度要大于含氢DLC薄膜的硬度。论文主要围绕UMBS技术沉积的非氢和含氢DLC薄膜力学性能展开研究，旨在为制备性能良好的非氢和含氢DLC薄膜提供实验依据。关键词：类金刚石(DLC)薄膜；非平衡磁控溅射；力学性能；显微硬度Mechanical Properties Of Nanoscale DLC FilmsAbstractDiamond-like carbon (DLC) film is an amorphous carbon film that exhibits a series of execellent properties such as high hardness,goodchemical inertness,high thermal conductivity,good transmittance in infrared and low wear coefficient.Compared with diamond film,DLC film has lower desposition temperature,larger deposition scale and smoother surface.It can be used as a new IR antireflective and protective material.Using unbalanced magnetron sputtering deposition on a monocrystalline silicon substrate non-hydrogen and hydrogen-containing DLC films,by changing the deposition time to obtain film samples of different thickness,and then using the nanoindentation instrument measuring the hardness of the film samples,Analysis of thin film deposition process on the mechanical properties of films. On this basis, the mechanical properties of the non-hydrogen and hydrogen-containing DLC films were analyzed and compared. The results show that:For the hydrogen-free DLC films,Other conditions remain unchanged,the geometric thickness of the films with deposition time is approximately linear growth.However, for hydrogen-containing DLC film,in addition to the deposition time affect the,methane gas flow ratio is an important factor affecting the film thickness;non-hydrogen DLC film