estimation of compositions of zr-cu binary sputtered film and its characterization估计zr-cu二进制溅射薄膜的成分及其特性.pdfVIP

Hindawi Publishing Corporation Advances in Materials Science and Engineering Volume 2008, Article ID 518354, 5 pages doi:10.1155/2008/518354 Research Article Estimation of Compositions of Zr-Cu Binary Sputtered Film and Its Characterization Katsuyoshi Kondoh,1 Junji Fujita,2 Junko Umeda,1 and Tadashi Serikawa1 1Joining and Welding Research Institute, Osaka University, 11-1 Mihogaoka, Ibaragi, Osaka 567-0047, Japan 2 Department of Mechanical Engineering, Osaka University, 1-1 Yamadaoka, Suita, Osaka 565-0871, Japan Correspondence should be