fabrication of si3n4 nanocrystals and nanowires using pecvd制备的氮化硅纳米晶体和纳米线用pecvd。.pdfVIP

Hindawi Publishing Corporation Advances in Materials Science and Engineering Volume 2010, Article ID 892792, 4 pages doi:10.1155/2010/892792 Research Article Fabrication of Si3N4 Nanocrystals and Nanowires Using PECVD Jingwei Song, Xiying Ma, Wang Zui, Chen Wei, and Zhongpin Chen School of Mathmatics and Physics, Suzhou University of Science and Technology, 1701 Binhe Road, Suzhou, 215011 Jiangsu, China Correspondence should be addressed to Xiying Ma, maxy@ Received 26 October 2009; Accepted 9 March 2010 Academic Editor: Dao Hua