design and characterization of nano-displacement sensor with high-frequency oscillators与高频振荡器nano-displacement传感器的设计和描述.pdfVIP

Hindawi Publishing Corporation Journal of Sensors Volume 2011, Article ID 360173, 5 pages doi:10.1155/2011/360173 Research Article Design and Characterization of Nano-Displacement Sensor with High-Frequency Oscillators Akio Kitagawa Division of Electrical Engineering and Computer Science, Kanazawa University, Kakuma-machi, Kanazawa 920-1192, Japan Correspondence should be addressed to Akio Kitagawa, kitagawa@is.t.kanazawa-u.ac.jp Received 21 April 2011; Accepted 29 June 2011 Academic Editor: Tuan Guo Copyright © 201