光探测器芯片小信号等效电路模型的建立.pdfVIP

半导体学报 VoL28 No.12 第 28 卷第12 期 2007 年 12 月 CHINES巴 JOU民NAL OF SEMICONDUCTORS Dec. ,2007 Small嗣Signal Equivalent Circuit Modeling of a Photodetector Chip 怜 Miao Angt , Li Yiqun , Wu Qiang , Cui Hailin , Huang Yongqing , Huang Hui , and Ren Xiaomin (Key Laborarory 01 Optical Communication and Lighr阳时 Technologiω o[ the Ministry o[ Education , Beijing University 01 Posts and Telecommunications , Beijing 100876 , China) Abstract: A small-signal equivalent circuit model and the extraction techniques for photodetector chips are presen- ted. The equivalent lumped circuít ,whích takes the maín factors that límit a photodetector s RF performanωinto consideration ,is first determíned based on the device s physical structure. The photodetector s S parameters are then on-wafer measured ,and the measured raw data are processed with further calibration. A genetic algoríthm is used to fit the measured data ,thereby allowing us to calculate each parameter value of the mode l. Experimental re. sults show that the modeled parameters are well matched to the measurements in a frequency range from 130MHz to 20GHz ,and the proposed method is proved feasible. Thís model can give an exact descriptíon of the photodetec- tor chips high frequency performance ,which enables an effective circuit-Ievel prediction for photodetector and optoelectronic integrated circuíts. Key words: small-signal equivalent circuit model of photodetector; parameter extraction; high frequency meas. urement; genetic algorithm PACC: 4280S , 0620D CLC Dumber: TN015 Document c刷Je: A Article ID: 0253-4177(2007)