simulation and system design of a 3d metrology optical system based on a bidirectional oled microdisplay仿真和系统设计的3 d测量光学系统基于双向oled集中.pdfVIP
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simulation and system design of a 3d metrology optical system based on a bidirectional oled microdisplay仿真和系统设计的3 d测量光学系统基于双向oled集中
Hindawi Publishing Corporation
Advances in Materials Science and Engineering
Volume 2012, Article ID 417376, 9 pages
doi:10.1155/2012/417376
Research Article
Simulation and System Design of a 3D Metrology Optical
System Based on a Bidirectional OLED Microdisplay
Constanze Großmann,1, 2 Ute Gawronski,3 Martin Breibarth,3
3 ¨ 3, 2
Gunther Notni, and Andreas Tunnermann
1 Fraunhofer IOF, Albert-Einstein-Straße 7, 07745 Jena, Germany
2 IAP, Friedrich-Schiller Un
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