simulation and system design of a 3d metrology optical system based on a bidirectional oled microdisplay仿真和系统设计的3 d测量光学系统基于双向oled集中.pdfVIP

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simulation and system design of a 3d metrology optical system based on a bidirectional oled microdisplay仿真和系统设计的3 d测量光学系统基于双向oled集中.pdf

simulation and system design of a 3d metrology optical system based on a bidirectional oled microdisplay仿真和系统设计的3 d测量光学系统基于双向oled集中

Hindawi Publishing Corporation Advances in Materials Science and Engineering Volume 2012, Article ID 417376, 9 pages doi:10.1155/2012/417376 Research Article Simulation and System Design of a 3D Metrology Optical System Based on a Bidirectional OLED Microdisplay Constanze Großmann,1, 2 Ute Gawronski,3 Martin Breibarth,3 3 ¨ 3, 2 Gunther Notni, and Andreas Tunnermann 1 Fraunhofer IOF, Albert-Einstein-Straße 7, 07745 Jena, Germany 2 IAP, Friedrich-Schiller Un

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