原创力文档development of an environmentally friendly resist-removal process using wet ozone发展环保使用湿臭氧resist-removal过程.pdfVIP
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development of an environmentally friendly resist-removal process using wet ozone发展环保使用湿臭氧resist-removal过程
Hindawi Publishing Corporation
International Journal of Polymer Science
Volume 2012, Article ID 937928, 7 pages
doi:10.1155/2012/937928
Review Article
Development of an Environmentally Friendly Resist-Removal
Process Using Wet Ozone
Hideo Horibe and Yousuke Goto
Department of Bioscience and Applied Chemistry, Graduate School of Science and Technology, Kanazawa Institute of Technology,
3-1 Yatsukaho, Hakusan, Ishikawa 924-0838, Japan
Correspondence should be addressed to Hideo Horibe, hhoribe@neptune.kanazawa-it.ac.jp
Received 1
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