fabricating pinhole-free ysz sub-microthin films by magnetron sputtering for micro-sofcs捏造pinhole-free ysz sub-microthin电影为micro-sofcs磁控溅射.pdfVIP

SAGE-Hindawi Access to Research International Journal of Electrochemistry Volume 2011, Article ID 479203, 8 pages doi:10.4061/2011/479203 Research Article Fabricating Pinhole-Free YSZ Sub-Microthin Films by Magnetron Sputtering for Micro-SOFCs T. Hill and H. Huang Department of Mechanical and Materials Engineering, Wright State University, Dayton, OH 45435, USA Correspondence should be addressed to H. Huang, hong.huang@ Received 2 September 2010; Revised 19 October 2010; Accepted 2 November 2010 Academic Editor: Boniface Kokoh