gas nozzle effect on the deposition of polysilicon by monosilane siemens reactor气体喷嘴对多晶硅的沉积影响烷西门子反应堆.pdfVIP

Hindawi Publishing Corporation International Journal of Photoenergy Volume 2012, Article ID 697653, 6 pages doi:10.1155/2012/697653 Research Article Gas Nozzle Effect on the Deposition of Polysilicon by Monosilane Siemens Reactor Seung Oh Kang, Uk June Lee, Seung Hyun Kim, Ho Jung You, Kun Park, Sung Eun Park, and Jong Hoon Park Technical RD Center, Semi-Materials Co., Ltd., Youngcheon, Gyeongbuk 770-803, Republic of Korea Correspondence should be addressed to Jong Hoon Park, jhpark@ Received 31 August 2011; Accepted 15 Decembe