gas-solid reaction properties of fluorine compounds and solid adsorbents for off-gas treatment from semiconductor facility气固反应氟化合物的性质和固体吸附剂从半导体设备尾气处理.pdfVIP

Hindawi Publishing Corporation International Journal of Chemical Engineering Volume 2012, Article ID 329419, 9 pages doi:10.1155/2012/329419 Research Article Gas-Solid Reaction Properties of Fluorine Compounds and Solid Adsorbents for Off-Gas Treatment from Semiconductor Facility Shinji Yasui,1 Tadashi Shojo,2 Goichi Inoue,2 Kunihiko Koike,2 Akihiro Takeuchi,3 and Yoshio Iwasa3 1 Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya 466-8555, Japan 2 Iwatani Corporation, 4-5-1 Katsube, Moriyama-shi, Shiga 524-0041, Japan