基于电磁激励的SOI-MEMS谐振式加速度计的闭环检测系统.PDF

第 10 卷 第 4 期 纳 米 技 术 与 精 密 工 程 Vol. 10 No. 4 20 12 年 7 月 Nanotechnology and Precision Engineering Jul. 20 12 Closed鄄Loop Control System of a SOI鄄MEMS Resonant Accelerometer with Electromagnetic Excitation ， ， ， 1 1 2 1 1 2 1 2 WANG Jun鄄bo ， SHANG Yan鄄long ， CHEN De鄄yong ， SHI Qiang ， LI Guang鄄bei （1. State Key Laboratory of Transducer Technology ， Institute of Electronics ， Chinese Academy of Sciences ， Beijing 100 190 ， China ； 2. Graduate University of Chinese Academy of Sciences ， Beijing 100 190 ， China ） Abstract ： A closed鄄loop control system with electromagnetic excitation designed for a SOI鄄MEMS resonant accelerometer is proposed in this paper. The sensor chip is developed by silicon鄄direct鄄 bonding SOI wafer （10 μm+2 μm+290 μm ） with MEMS fabrication technology. z鄄axis acceleration is differentially detected by using two H鄄style vibrating beams through a frequency shift caused by the inertial force acting as bending stress loading. Frequency change of vibrating beams is used to calibrate acceleration. Electromagnetic excitation and detection are adopted to make the closed鄄loop control of the sensor easier. The whole closed鄄loop control system for the accelerometer mainly consists of amplifier ， automatic gain control （AGC） circuit ， buffer and phase shifter. Testing results show that