structural and electrical properties of polysilicon films prepared by aic process for a polycrystalline silicon solar cell seed layer多晶硅薄膜的结构和电气性能由aic过程为多晶硅太阳能电池种子层.pdfVIP
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structural and electrical properties of polysilicon films prepared by aic process for a polycrystalline silicon solar cell seed layer多晶硅薄膜的结构和电气性能由aic过程为多晶硅太阳能电池种子层
Hindawi Publishing Corporation
International Journal of Photoenergy
Volume 2012, Article ID 593257, 7 pages
doi:10.1155/2012/593257
Research Article
Structural and Electrical Properties of Polysilicon Films
Prepared by AIC Process for a Polycrystalline Silicon Solar
Cell Seed Layer
Hyejeong Jeong and Seongjae Boo
Energy and Applied Optics Research Group, Korea Institute of Industrial Technology (KITECH), 1110-9 Oryong-dong, Buk-gu,
Gwangju 500-480, Republic of Korea
Correspondence should be addressed to Seongjae Boo, sboo@kitech.re.kr
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