SingleChip Condenser Miniature Microphone （单片机冷凝器微型麦克风）.pdf

SINGLE-CHIP CONDENSER MINIATURE MICROPHONE WITH A HIGH SENSITIVE CIRCULAR CORRUGATED DIAPHRAGM 1 1 1 1 1 2 Jing Chen , Litian Liu , Zhijian Li , Zhimin Tan , Yang Xu and Jun Ma 1Institute of Microelectronics, Tsinghua University, Beijing, 100084, P. R. China 2Institute of Acoustics, Chinese Academy of Sciences, Beijing, 100080, P. R. China ABSTRACT circular corrugated diaphragm was proposed and developed. The fabrication process revealed high yield, A novel single-chip condenser miniature microphone with allowing a low cost production of high performance a circular corrugated diaphragm for residual stress microphones capable of on-chip integration of signal releasing has been proposed, fabricated and tested. The processing electronics. condenser microphone consists of a rigid single-crystal backplate and a flexible circular corrugated diaphragm STRUCTURE AND FABRICATION using induced couple plasma(ICP) etching. An electrostatic-structural coupling finite element The diaphragm-based structures can be realized in one analysis(FEA) was performed for design optimization. A