Studies on CO2 laser micromachining on PMMA （研究二氧化碳激光微加工PMMA）.pdf

th th th th 5 International 26 All India Manufacturing Technology, Design and Research Conference (AIMTDR 2014) December 12 –14 , 2014, IIT Guwahati, Assam, India Studies on CO laser micromachining on PMMA to fabricate micro 2 channel for microfluidic applications KantRishi1,2, *, Gupta Ankur1,2, Bhattacharya S.1,2 1Microsystems fabrication laboratory, IIT Kanpur - 208016, 2Mechanical Engineering Department, IIT Kanpur - 208016, * dsrishikant@, drankur@iitk.ac.in, bhattacs@iitk.ac.in Abstract Microfluidic devices are in great demand in the field of biomedical technology,point of care diagnostics and chemical analysis. The rapid and low cost manufacturing of these devices have been a challenge. CO2 laser micromachining plays an important role in machining although it renders the machined surfaces with high roughness.This study is an attempt to do process optimization of laser micromachining technique which may produce smooth machined surfaces. Herein, the impact of process parameters like raster speed ,laser power, print resolution etc. are optimized using two target functions ofdimensional precision and surface roughness on microchannels made in PMMA (Poly methyl metha acrylate) substrates. The laser machined PMMA samples are analyzed using 3D- profilometry and Field emission scanning electron microscope (FESEM) for surface quality and dimensional precision.To in