SURFACE TOPOGRAPHY REPRESENTATION IN （表面形貌表征在）.pdfVIP

XVI IMEKO World Congress Measurement - Supports Science - Improves Technology - Protects Environment ... and Provides Employment - Now and in the Future Vienna, AUSTRIA, 2000, September 25-28 SURFACE TOPOGRAPHY REPRESENTATION IN PROFILOMETRY M. Wieczorowski, A. Cellary and J. Chajda Division of Metrology and Measuring Systems Institute of Mechanical Technology Poznan University of Technology, 61-138 Poznan, Poland Abstract: In the paper the authors presented a comparison analysis of three differ- ent probes used for surface topography measurement. Skid and skidless stylus probes were used as contact pick-ups, while an optical autofocussing pick-up was applied as a non-contact one. The analysis was performed using several different topography parameters. It showed that a skid causes some relatively small distor- tions as far as the surface representation is concerned. The optical probe on the other hand proved to be a very difficult measuring tool, particularly for surfaces with steep slopes and sharp edges. Yet even for very smooth surfaces a great attention must be paid while measuring with this kind of pick-up is considered. Keywords: surface topography, profilometry, probes 1 INTRODUCTION A traditional 2D surface profile analysis is - for some years now - still more often replaced with 3D topographical assessment, as data obtained from only one profile may give distorted information about the analyzed surface. Furthermore, it is well known that a proper functionality and durability of such elements like bearings, gears and cylinder liners can be assured by a proper surface topog