原创力文档a low-cost cmos-mems piezoresistive accelerometer with large proof mass低成本cmos-mems压阻加速度计与大质量的证据.pdfVIP
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a low-cost cmos-mems piezoresistive accelerometer with large proof mass低成本cmos-mems压阻加速度计与大质量的证据
Sensors 2011, 11, 7892-7907; doi:10.3390/s110807892
OPEN ACCESS
sensors
ISSN 1424-8220
/journal/sensors
Article
A Low-Cost CMOS-MEMS Piezoresistive Accelerometer with
Large Proof Mass
Mohd Haris Md Khir †, Peng Qu and Hongwei
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