a z-axis quartz cross-fork micromachined gyroscope based on shear stress detection基于剪切应力的z轴石英cross-fork陀螺仪的检测.pdfVIP

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a z-axis quartz cross-fork micromachined gyroscope based on shear stress detection基于剪切应力的z轴石英cross-fork陀螺仪的检测.pdf

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a z-axis quartz cross-fork micromachined gyroscope based on shear stress detection基于剪切应力的z轴石英cross-fork陀螺仪的检测

Sensors 2010, 10, 1573-1588; doi:10.3390/s100301573 OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article A Z-Axis Quartz Cross-Fork Micromachined Gyroscope Based on Shear Stress Detection Liqiang Xie *, Xuezhong Wu, Sh

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