原创力文档an electromagnetically excited silicon nitride beam resonant accelerometer一个电磁兴奋氮化硅梁谐振式加速度计.pdfVIP
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an electromagnetically excited silicon nitride beam resonant accelerometer一个电磁兴奋氮化硅梁谐振式加速度计
Sensors 2009, 9, 1330-1338; doi:10.3390/
OPEN ACCESS
sensors
ISSN 1424-8220
/journal/sensors
Article
An Electromagnetically Excited Silicon Nitride Beam Resonant
Accelerometer
Deyong Chen *, Zhengwei Wu, Lei Liu,
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