原创力文档an integrated laser-induced piezoelectricdifferential confocal surface acoustic wave system for measurement of thin film young’s modulus一个集成的激光piezoelectricdifferential共焦声表面波系统测量薄膜的杨氏模量.pdfVIP
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an integrated laser-induced piezoelectricdifferential confocal surface acoustic wave system for measurement of thin film young’s modulus一个集成的激光piezoelectricdifferential共焦声表面波系统测量薄膜的杨氏模量
Sensors 2012, 12, 12208-12219; doi:10.3390/s120912208
OPEN ACCESS
sensors
ISSN 1424-8220
/journal/sensors
Article
An Integrated Laser-Induced Piezoelectric/Differential
Confocal Surface Acoustic Wave System for Measurement of
Thin Film Yo
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