原创力文档design and fabrication of a mems flow sensor and its application in precise liquid dispensing设计和制造精确的mems流量传感器及其应用液体分配.pdfVIP
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design and fabrication of a mems flow sensor and its application in precise liquid dispensing设计和制造精确的mems流量传感器及其应用液体分配
Sensors 2009, 9, 4138-4150; doi:10.3390/
OPEN ACCESS
sensors
ISSN 1424-8220
/journal/sensors
Article
Design and Fabrication of a MEMS Flow Sensor and Its
Application in Precise Liquid Dispensing
Yaxin Liu *, Liguo Chen
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