原创力文档development of 3d force sensors for nanopositioning and nanomeasuring machine发展三维力传感器nanopositioning和nanomeasuring机器.pdfVIP
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development of 3d force sensors for nanopositioning and nanomeasuring machine发展三维力传感器nanopositioning和nanomeasuring机器
Sensors 2009, 9, 3228-3239; doi:10.3390/
OPEN ACCESS
sensors
ISSN 1424-8220
/journal/sensors
Article
Development of 3D Force Sensors for Nanopositioning and
Nanomeasuring Machine
Arti Tibrewala 1,*, Norbert Hofmann 2, Anurak Phat
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