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development of a prototype miniature silicon microgyroscope微型硅microgyroscope原型的开发
Sensors 2009, 9, 4586-4605; doi:10.3390/
OPEN ACCESS
sensors
ISSN 1424-8220
/journal/sensors
Article
Development of a Prototype Miniature Silicon Microgyroscope
Dunzhu Xia *, Shuling Chen and Shourong Wang
Scho
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