dry etching of copper phthalocyanine thin films effects on morphology and surface stoichiometry干蚀刻铜酞菁薄膜对形态和表面化学计量的影响.pdfVIP

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dry etching of copper phthalocyanine thin films effects on morphology and surface stoichiometry干蚀刻铜酞菁薄膜对形态和表面化学计量的影响.pdf

dry etching of copper phthalocyanine thin films effects on morphology and surface stoichiometry干蚀刻铜酞菁薄膜对形态和表面化学计量的影响

Molecules 2012, 17, 10119-10130; doi:10.3390/molecules170910119 OPEN ACCESS molecules ISSN 1420-3049 /journal/molecules Article Dry Etching of Copper Phthalocyanine Thin Films: Effects on Morphology and Surface Stoichiometry Jaron G. Va

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