dry etching of copper phthalocyanine thin films effects on morphology and surface stoichiometry干蚀刻铜酞菁薄膜对形态和表面化学计量的影响.pdfVIP
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dry etching of copper phthalocyanine thin films effects on morphology and surface stoichiometry干蚀刻铜酞菁薄膜对形态和表面化学计量的影响
Molecules 2012, 17, 10119-10130; doi:10.3390/molecules170910119
OPEN ACCESS
molecules
ISSN 1420-3049
/journal/molecules
Article
Dry Etching of Copper Phthalocyanine Thin Films: Effects on
Morphology and Surface Stoichiometry
Jaron G. Va
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