原创力文档dynamic characteristics of vertically coupled structures and the design of a decoupled micro gyroscope垂直耦合结构的动态特性和分离的微陀螺仪的设计.pdfVIP
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dynamic characteristics of vertically coupled structures and the design of a decoupled micro gyroscope垂直耦合结构的动态特性和分离的微陀螺仪的设计
Sensors 2008, 8, 3706-3718; DOI: 10.3390/s8063706
OPEN ACCESS
sensors
ISSN 1424-8220
/sensors
Article
Dynamic Characteristics of Vertically Coupled Structures and
the Design of a Decoupled Micro Gyroscope
Bum
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