原创力文档electrical characterization of microelectromechanical silicon carbide resonators电气特性的微机电碳化硅谐振器.pdfVIP
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electrical characterization of microelectromechanical silicon carbide resonators电气特性的微机电碳化硅谐振器
Sensors 2008, 8, 5759-5774; DOI: 10.3390/s8095759
OPEN ACCESS
sensors
ISSN 1424-8220
/sensors
Article
Electrical Characterization of Microelectromechanical Silicon
Carbide Resonators
Wen-Teng Chang 1,* and Christ
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