potentiometric co2 sensor using li ion conducting li3po4thin film electrolyte电位二氧化碳传感器使用锂离子电解液导电li3po4thin电影.pdfVIP

Sensors 2005, 5, 465-472 sensors ISSN 1424-8220 © 2005 by MDPI /sensors + Potentiometric CO Sensor Using Li Ion Conducting Li PO 2 3 4 Thin Film Electrolyte Whyo Sub Noh 1, L. Satyanarayana 2 and Jin Seong Park 1,* 1Department of Material Science and Engineering, Chosun University, Gwangju 501-759, Korea 2Research Institute of Energy Resources Technology, Chosun University, Gwangju 501-759, Korea * Author to whom correspondence should be addressed: jsepark@chosun.ac.kr Received: 9 June 2005 / Accepted 15 November 2005 / Published: 16 November 2005 + Abstract: Li ion conducting Li PO thin film electrolytes with thickness 300nm, 650nm and 3 4 1.2µm were deposited on Al O substrate at room temperature by thermal evaporation method. 2 3 Reference and sensing electrodes were printed on Au interfaces by conventional screen printing technique. The overall dimension of the sensor was 3 x 3 mm and of electrodes were 1 x 1.5 mm each. The fabricated solid state potentiometric CO sensors of type: CO , O , Au, Li TiO -TiO ⎢ 2 2 2 2 3 2 Li PO ⎮Li CO , Au, CO , O have been investigated for CO sensing properties. The 3 4 2 3