原创力文档stability, nonlinearity and reliability of electrostatically actuated mems devices稳定性、非线性和静电驱动mems器件的可靠性.pdfVIP
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stability, nonlinearity and reliability of electrostatically actuated mems devices稳定性、非线性和静电驱动mems器件的可靠性
Sensors 2007, 7, 760-796
sensors
ISSN 1424-8220
© 2007 by MDPI
/sensors
Review
Stability, Nonlinearity and Reliability of Electrostatically
Actuated MEMS Devices
Wen-Ming Zhang 1,*, Guang Meng 1 and Di Chen 2
1 State Key Laboratory of Mechanical System and Vibration, Shanghai Jiao Tong University,
800 Dongchuan Road, Shanghai 200240, China
2 National Key Laboratory of Micro/Nano Fabrication Technology, Shanghai Jiao Tong University,
1954 Huashan Road, Shanghai 200030, China
* Author to whom correspondence should be addressed; E-mail: wenmingz@.
Received: 13 April 2007 / Accepted: 22 May 2007 / Published: 31 May 2007
Abstract: Electrostatic micro-electro-mechanical system (MEMS) is a special branch with
a wide range of applications in sensing and actuating devices in MEMS. This paper
provides a survey and analysis of the electrostatic force of importance in MEMS, its
physical model, scaling effect, stability, nonlinearity and reliability in detail. It is necessary
to understand the effects of electrostatic forces in MEMS and then many phenomena of
practical importance, such as pull-in instability and the effects of effective stiffness,
dielectric charging, stress gradient, temperature on the pull-in voltage, nonlinear dynamic
effects and reliability due to electrostatic forces occurred in MEMS can be explained
scientifically, and consequently the great potential of MEMS technology could be expl
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