原创力文档development of a microelectromechanical system (mems)-based multisensor platform for environmental monitoring开发一个基于微机电系统(mems)的多传感器环境监测平台.pdfVIP
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development of a microelectromechanical system (mems)-based multisensor platform for environmental monitoring开发一个基于微机电系统(mems)的多传感器环境监测平台
Micromachines 2011, 2, 410-430; doi:10.3390/mi2040410
OPEN ACCESS
micromachines
ISSN 2072-666X
/journal/micromachines
Article
Development of a Microelectromechanical System
(MEMS)-Based Multisensor Platform for
Environ
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