direct wafer bonding and its application to waveguide optical isolators晶片直接键合技术及其应用于波导光学光电隔离器.pdfVIP
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direct wafer bonding and its application to waveguide optical isolators晶片直接键合技术及其应用于波导光学光电隔离器
Materials 2012, 5, 985-1004; doi:10.3390/ma5050985
OPEN ACCESS
materials
ISSN 1996-1944
/journal/materials
Review
Direct Wafer Bonding and Its Application to Waveguide
Optical Isolators
Tetsuya Mizumoto *, Yuya Shoji and Ryohei
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