材料电阻率测试.pdf

TECHNIQUES FOR MEASURING RESISTIVITY FOR MATERIALS CHARACTERIZATION –– 4200A-SCS PARAMATER ANALYZER APPLICATIONS GUIDE TECHNIQUES FOR MEASURING RESISTIVITY FOR MATERIALS CHARACTERIZATION APPLICATIONS GUIDE Which Kelvin method is right for your resistivity measurements? The two application notes in this materials characterization applications guide offer tips and techniques for choosing between the Four-Point Collinear Probe or van Der Pauw methods based on the type, shape, and thickness of your material and the magnitude of its resistance. CONTENTS Resistivity Measurements of Semiconductor Materials Using the 4200A-SCS Parameter Analyzer and a Four-Point Collinear Probe 3 van der Pauw and Hall Voltage Measurements with the4200A-SCS Parameter Analyzer 8 WWW.TEK.COM | 1 2 | WWW.TEK.COM Resistivity Measurements of Semiconductor Materials Using the 4200A-SCS Parameter Analyzer and a Four-Point Collinear Probe Introduction The Four-Point Collinear Electrical resistivity is a basic material property that quantifies Probe Method a material’s opposition to current flow; it is the reciprocal The most common way of measuring the resistivity of a of conductivity. The resistivity of a material depends upon semiconductor material is by using a four-point collinear several factors, including the material doping, processing, probe. This technique involves bringing four equally spaced and environmental factors such as te