毕业论文（设计）多晶硅太阳电池表面织构化工艺的研究.docVIP

多晶硅太阳电池表面织构化工艺的研究 摘 要 表面织构化（制作绒面）是提高太阳电池效率的重要手段。多晶硅表面织构工艺，目前在工业化生产中还没有全面推广。如何判绒面的质量，以及如何实现稳定的工业生产等问题还有待解决。本文研究了以硝酸和氢氟酸为基础的腐蚀液对多晶硅表面的化学腐蚀。 酸的浓度对硅片的微观形貌、腐蚀速率、溶液稳定性等方面的有较大影响。硝酸或氢氟酸浓度的微小变化都会影响硅片表面形貌，因此要保证绒面形貌，必须严格控制溶液浓度，使之保持在一定的浓度范围。在大批量工业生产中，随着酸的消耗，必然导致溶液浓度的变化，及时调整溶液浓度是保证工业生产的一个关键问题。 微观形貌对电池生产工艺和电池性能有一定的影响。反射率较低的样品，晶体缺陷处和晶界处会被腐蚀得比较深，对清洗、钝化、印刷电极等造成不利影响；反射率较高的样品，有比较平整的表面形貌，但陷光效果不理想。如何兼顾光学性能和电学性能，选择最合适的微观形貌，是制作多晶硅绒面要解决的一个主要问题。 本文应用绒面技术工艺，在125mm×125mm的多晶硅片上制作绒面，分析了……。制得的电池的短路电流密约为32mA/cm2，达到了增加硅表面对光吸收的效果。 关键词：多晶硅；表面织构化；微观形貌；晶格缺陷 Investigation of texturization for multicrystalline silicon solar cells Condensed state physics Name：Xu Xinxiang Supervisor: Professor Shen Hui ABSTRACT Surface texturing is one of the key techniques to improve the efficiency of silicon solar cell. The technique of multicrystalline texturing has not been widely used in industry. Some problems need to be solved, such as how to judge the quality of the texturing, and how to keep the stability in the industrial manufacture. In this paper, I investigate wet chemical etching on multicrystalline silicon wafer. The acidic mixtures contain hydrofluoric and nitric acid. The concentration of the mixtures affects the microcosmic formation, etching rate and the stability of the mixture. Even the tiny change of the hydrofluoric acid or the nitric acid would bring different formation. So the concentration should be kept in an allowable range. In the industrial solar cell processing, the concentration changes when the acid consumes. Adjusting the concentration in time is the guarantee of formation. The microcosmic formation affects the manufacture process and the cell performance. The samples which have low reflectance present deep groove where the crystal lattice has defects. This kind of groove takes disadvantage on cleaning, passivation and screen printing. The high reflectance samples have the smooth formation, but the light trapping is not idealized. How to make the balance between the light trapping an