电子显微分析（章晓中）教学课件chapter22.pdfVIP

7.3 Electron Probe Microanalyser (EPMA) 电子探针 • EPMA is essentially a purpose-built analytical microscope of SEM type. • EPMA uses a thick electron beam of diameter of ~1m as a “electron probe” to excite X-rays from the region of ~1 m size near surface of the sample. The X-rays are then analyzed by WDS to determine the composition of the specimen. EPMA is similar to SEM+WDS but different at: • SEM emphasize the high resolution ability. It uses a very thin electron beam with diameter of about a few nm. • EPMA is mainly used for compositional analysis. It uses quite thick electron beam for exciting enough X-ray and has several WDS. EPMA is equipped with a optical microscope for easy observation and adjust precisely the height of the specimen. The objective lens and specimen chamber of EPMA need specially designed. Electron Probe Microanalyzer JEOL JXA-8530F •Structure: 5 WDS + 1 EDS, •Elements detectable: Be (Z=4) – U (Z=92) •Resolution of secondary electron image: 3nm 7.4 Applications of X-ray detector sample preparation – Sample should be conducting. If the sample is non-conducting material，the gold or carbon should be coated. – For WDS analysis, the surface of the specimen should be very flat. – For EDS analysis, non-flat specimen can also be used. Analysis methods • spot analysis (点分析） • line scan （线扫描） • element mapping （面扫描） spot analysis The electron beam is placed on the point to be analyzed. Then start EDS analysis. Line scan Select the X-ray signal from an element of interest, and to display its intensity as the beam is scanned. For an EDS system, it is necessary to make the retemeter sensitive only to the counts going to a