BT_Imaging公司设备介绍英文.pdf

LIS-R1 Introduction BT Imaging Pty Ltd - Confidential Information - Not For Distribution 1 Agenda • R1 Overview • R1 Features • Customer Base • R1 Application Examples BT Imaging Pty Ltd - Confidential Information - Not For Distribution 2 LIS-R1 Overview • Flexible - PL, EL, RS, QSS-PC, lifetime image in a single tool • Wafer, Cells and Blocks (optional) • Use PL at any process stage • Correlates with other techniques • Highest Resolution Images • 1 megapixel • Fastest Data Acquisition • 1 second for cells Speeds up RD, characterization and root cause analysis BT Imaging Pty Ltd - Confidential Information - Not For Distribution 3 Capabilities by Sample Type Capabilities Silicon Silicon Silicon Block Wafer Solar Cell Photoluminescence Image    Average Injection level Dependant  Lifetime (QSS-PC) Effective Minority Carrier Lifetime  Image Electroluminescence Image  Series Resistance Image  BT Imaging Pty Ltd - Confidential Information - Not For Distribution 4 PV supply chain - applications for luminescence imaging PL: EL: Si ingot/brick As-cut wafer Processed wafer Finished cell Module Wafer manufacturing Cell manufacturing Module manufacturing BT Imaging Pty Ltd - Confidential Information - Not