复合控制模式的长行程纳米定位控制系统 Development of a Long-stroke Nano-positioning Compound Control System.pdfVIP

·28· 新技术新仪器 复合控制模式的长行程纳米定位控制系统 张晴，王呐，周浩 (合)El-业大学仪器科学与光电工程学院，安徽合肥230009) NeuralNetwork 摘 要：提出一种基于BPNN—PID(BackPropagation PID)的纳米定位控制系统。该系统包括 ofFreedom (MultiDegrees 制步距，DC模式下重新使用BPNN．PID来锁定平台位置以达到准确定位。以SIOS 准搭建实验系统进行精度校正。实验表明：该系统在全程20Inn的行程内，定位误差在10nm以内，标准差小于 5nm。 关键词：BPNN—PID；超音波马达；定位控制；MDFS 中图分类号：TB921 文献标识码：B of Control a DevelopmentLong-strokeNano-positioningCompoundSystem ZHANG Hao Na．ZHOU Qing．WANG ofInstrumentScienceand of (School EbgubeebubgrnGefeuTechnology，Hefei230009，China) opto-ekeetnbuces Ibuvemity control is onbaseof NeuralNetwork in— Abstract：A BPNN-PID(Back PID)．The nano—positioningsystempresented Propagation system cludestheultrasonicmotorHR4anditsdriverAB2foradrive two-coordinate amulti offreedomsen- degrees platform，aco—plane platform，and for motorHR4anditsdriverAB2 threedrive andDC feedback．The sor(MDFS)usedprecisedisplacement generates modes(AC，GATE fitdifferent andresolutions．BPNN—PIDisusedinACmodetocontrolthe PIDisusedin modes)to travels，speeds speed，asimpleproportional Gatemodetocontrolthe isused inDCmodetolockthe calibration withSIOS BPNN·PIDcontrol steplength，and again position．By experiments SP一2000 thetravel of is within10nnlwiththestandarddevi