19JPC万能工具显微镜装置的研究及精度分析.pdfVIP

第 22 卷 第 3 期 湖南理工学院学报( 自然科学版) Vol.22 No.3 2009 年 9 月 Journal of Hunan Institute of Science and Technology (Natural Sciences) Sep. 2009 19JPC 万能工具显微镜装置的研究及精度分析 谭湘夫, 周 勇 (湖南理工学院 机械与电气工程系, 湖南 岳阳 414006) 摘 要: 介绍了用微机型万能工具显微镜进行影像测量的测量原理. 具体说明了该测量装置的系统构架, 并对其精度 进行了分析. 影像测量法在工具显微镜和投影仪等光学仪器中应用非常广泛. 影像测量法的最大优点是非接触式测量, 影 像测量法对工件的表面与变形无影响. 虽然影像法存在一定的测量误差, 但这种方法测量方便, 因此应用较广. 关键词: 万能工具显微镜; 二维影像测量法; 测量误差; 系统误差; 偶然误差 中图分类号: TH741.8 文献标识码: A 文章编号: 1672-5298(2009)03-0056-03 Research and Precision Analysis of 19JPC Multifunction Tool Microscope TAN Xiang-fu, ZHOU Yong (Department of Mechanical and Electrical Engineering, Hunan Institute of Science and Technology, Yueyang 414006, China) Abstract: This paper introduces the measuring principle of shadow measuring method using pc-type multifunction tool microscope. The composing of the measuring device is presented in detail. The effects on the testing precision are also analyzed. Shadow measuring method is widely applied in optical testing instruments such as tool microscopes, projection apparatuses. Non-contact measuring is the largest virtue in shadow measuring method by which the work-piece’s surfaces and deformations will not be affected. The shadow measuring method is much convenient and used in many testing fields although the testing method results in some measuring errors. Key words: multifunction tool microscope; 2D shadow measuring method; testing error; system error; occasional error 引 言 万能工具显微镜是一种用途非常广泛的计量光学仪器, 是机械工业、国防工业和科学研究领域中不可 缺少的计量工具. 最早出现的工具显微镜是由普通显微镜发展而来的, 我们利用显微镜来观察微小的物体, 但是无法对其进行几何量的测量. 由于机械工业的发展, 需要一种能比较精确地测量机械零件