参考论文1-郭.docVIP

摘 要 本文主要介绍单晶硅太阳能电池片的生产工艺及检验。单晶硅太阳能电池片生产程序主要有来料检验-清洗制绒-扩散-刻蚀-去PSG-PECVD-丝网印刷-烧结-测试.通过D8测试仪,椭片仪,扫描电子显微镜,少子寿命测试仪,效率分选测试仪等测试其分析其参数.通过学习,发现各道工艺对电池的效率等参数的影响. 关键词： 单晶硅, 太阳能电池片,生产工艺 Abstract This paper mainly introduces the silicon solar -products production technology and inspection procedures. Its production main incoming inspection - cleaning system flocking - diffusion - etching - to PSG - PECVD - screen printing - sintering - test. Through the D8 tester, directed, slice, scanning electron microscope, separating efficiency ShaoZi life tester and test the analysis of its parameters, the study found. Through the efficiency of process parameters such as batteries. Keywords : Monocrystalline silicon ,solar -products, production process  目 录 第1章 太阳能电池简介·············································· 第1.1节 太阳能电池的研究背景 ···································· 第1.2节 半导体材料简介··········································· 第2章 太阳能电池片的生产工艺··································· 第2.1节 清洗制绒················································ 第2.2节 扩散与刻蚀················································ 第2.3节 PECVD制备SIN薄膜········································ 第2.4节 丝网印刷及烧结············································ 第3章 太阳能电池片的测试方法····································· 第3.1节 D8测试仪·················································· 第3.2节 扫描电子显微镜分析······································· 第3.3节 膜厚的测试与分析········································· 第3.4节 数字式四探针测试仪······································· 第3.5节 效率测试仪测试··········································· 第3.6节 各工艺对电池片性能的影响································ 小 结······························································· 参 考 文 献·························································· 致 谢·······························································  第1章 太阳能电池简介 第1.1节 太阳能电池的研究背景 人类迄今已有400万年的历史，在这期间，人类从学会使用火开始，经过石器、铁器时代，直到近代工业化革命，各种技术发明使人类文明到达了一个前所未有的高度。同时，人类消耗的能源也日益增长，其中煤、石油等是今天主要的能源来源 今天，能源更是人类社会赖以生如图1-1所示 存和发展的物质基础，在国民经济中具有特别重要的战