[信息与通信]光刻胶介绍.pptVIP

* * * * * * * Confidential Confidential 光刻胶（光阻）介绍 What is Photoresist? What is Photo resist Photoresist is a photosensitive compound, which can transfer the designed pattern from mask to wafer through exposure and develop, and it will play the role of resist to block implant or etching at the subsequent step. Wafer Film Film Deposition Wafer Film Photoresist Resist Coat Wafer Film Photoresist UV Exposure hv Reticle Wafer Developing Film Wafer Etch Gas Photo resist in photolithography process Wafer Implant Film Classification of Photo resist By wave length of exposure light G-line resist (436nm