电磁驱动微运动的测量与控制方法毕业设计论文（设计）.docVIP

摘 要 在微运动系统中，驱动器是实施微运动的关键部件，为了实现高精度的微运动，驱动器必须具备高运动精度和高定位精度，因此驱动器技术是微运动系统的核心技术。概括国内外微运动系统驱动器技术，从驱动原理和方式上看，主要驱动形式有压电驱动、静电驱动、形状记忆合金驱动和电磁驱动等。 这次我的毕业设计的主要内容是：采用电磁驱动、电感传感器和PID控制方法，设计一套一维电磁式微驱动器的测量与控制系统，该驱动器的运动范围是5mm、分辨率是1μm。 本次毕业设计第1章介绍了电磁驱动国内外研究的现状和发展趋势介绍了电磁驱动的研究意义。第2章介绍了电磁驱动系统总体框图对电磁铁驱动理论和电感传感器理论进行了分析。第3章设计了电感传感器的信号采集电路和基于AD698的电感传感器信号调理电路，对AT89C51做了简要的介绍，设计出了基于AD7705与89C51的AD转换电路和基于ZLG7290与89C51的显示电路的硬件设计。设计了电磁驱动的功率放大电路。第4章对前面所做的工作和工作过程的感想做了小结。 此次毕业设计主要要完成的有：电磁驱动器的设计，电压放大，A/D、LED显示管的选用以及单片机和它们的连接，简单的单片机编程，PID控制方法和原理等内容。 关键词：微机电系统；电磁驱动器；单片机；控制测量；硬件设计Abstract In the micro-motion system, the drive is a key component of the implementation of micro-movements, in order to achieve high-precision micro-motion, the driver must have high precision and high positioning accuracy of motion, so the drive technology is the core technology of micro-motion system. General domestic and micro-motion system drive technology, principles and methods from the driver point of view, the main driver in the form of piezoelectric, electrostatic actuation, shape memory alloy driver and electromagnetic drives. The graduation of my main content is: using electromagnetic drive, inductive sensors and PID control method to design a one-dimensional electromagnetic micro drive and control system of measurement, range of motion of the drive is 5mm, the resolution is 1μm. The graduation project Chapter 1 describes the status of the electromagnetic drive domestic and foreign research and development trend of the research described electromagnetic drive meaning. Chapter 2 describes the overall block diagram of the electromagnetic drive system theory and the inductive sensor solenoid-driven theory is analyzed. Chapter 3 Design of the inductive sensor signal acquisition circuit and the inductance based on AD698 sensor signal conditioning circuit, a brief introduction of AT89C51 is designed based on the AD7705 and the 89C51 of the AD conversion circuit and the display based on ZLG7290 with the 89C51 hardwa