半导体研究2.pdfVIP

VACT’s Rotatable Sputtering Technology e m a n e l i f / 5 0 0 2 , 3 2 e n u J 1 COMPANY CONFIDENTIAL Outline 1 Key Requirements for a Modern Magnetron 2 Key Features of VACT’s C-MAG® Cathode 1 Proprietary VAC-MAGTM Endblock 2