飞秒激光在硅表面微加工的研究文档.pptVIP

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飞秒激光在硅表面微加工的研究文档.ppt

飞秒激光在硅表面微加工的研究文档

* The laser beam approximates to a Gaussian shape for intensity spatial profile. A 5 objective * This interference leads to periodic modulation of the absorbed intensity and consequently to modulated ablation. The thermal annealing, the characteristics of the materials, the re-solidification of molten materials and so on may be responsible for the formation of ripples. * This interference leads to periodic modulation of the absorbed intensity and consequently to modulated ablation. The thermal annealing, the characteristics of the materials, the re-solidification of molten materials a

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