Effects of Low Dose Silicon Carbon and Oxygen Implantation…低剂量硅碳和氧植入的影响.pdfVIP

3516 J. Electrochem. Soc., Vol. 141, No. 12, December 1994 9 The Electrochemical Society, Inc. REFERENCES John Wiley Sons, Inc., New York (1985). i. S.P. Murarka, J. Steigerwald, and R. J. Gutmann, MRS 7. F. B. Kaufman, D. B. Thompson, R. E. Broadie, M. A. Bulletin, Vol. XVII, p. 46 (June 1993). Jaso, W. L. Guthrie, D. J. Pearsons, and IV[.B. Small, 2. S.P. Murarka, in Tungsten