SG滤波在朗缪尔探针信号处理中的应用.pdf

37 17 2011 9 Vol.37 No. 17 Computer Engineering September 20 11 ·· 2011 A TN911.72 SG ( 230027) Savitzky-Golay(SG) SG SG Application of SG Filtering in Langmuir Probe Signal Processing SANG Qing-shuang, CHENG Jian (Department of Automation, University of Science and Technology of China, Hefei 230027, China) Abstract While measuring radio frequency plasma s parameters by Langmuir probe, the I-V characteristic curve is always distorted by electromagnetic interference, and this influences the parameters calculation and analysis. This paper adopts a Savitzky-Golay(SG) filtering algorithm which is used for smoothing I-V characteristic curve, and this brings accurate parameters. Experimental results show Savitzky-Golay filtering of the divided I-V characteristic can bring low signal distortion rate and high accurate Electron Energy Probability Function(EEPF). Key words Langmuir probe; plasma; I-V characteristic curve; Savitzky-Golay(SG) filtering; Electron Energy Probability Function(EEPF) DOI: 10.3969/j.issn.1000-3428.2011.17.074 1 P E E 5 cm 1 2 (I-V ) (Electron Energy Probability Function , EEPF) [1] 3 EEPF 3.1 EEPF EEPF