热原子层沉积技术制备TiAlCN薄膜的特性-CNKI.PDF

淼岉祵淼岉祵淼岉祵淼岉祵淼岉祵淼岉祵淼岉祵淼岉祵淼岉祵淼岉祵淼岉祵淼岉祵淼岉祵淼岉祵淼岉祵淼 锛わ集锛╋細锛戯紣锛庯紤锛擄紥锛欙紣锛 锝婏紟锝冿綆锝嬶綁锛庯絺锝勶綌锝婏綋锛庯紥锛愶紤锛楋紟锛戯紣锛庯紣锛愶紬 鐑師瀛愬眰娌夌Н鎶€鏈埗澶囷即锝夛肌锝岋迹锛杽鑶滅殑鐗规€ 鏉ㄦ案浜紝 鏉庡锛 闄堝箍钀嶏紝 宀宠帀 锛堝嚡閲屽闄㈢墿鐞嗕笌鐢靛瓙宸ョ▼瀛﹂櫌锛 璐靛窞 鍑噷锛曪紩锛栵紣锛戯紤锛 鎽樿锛 鍦 锛筹綁 鍜 锛筹綁锛 鍩哄簳涓婏紝 閲囩敤鐑師瀛愬眰娌夌Н鎶€鏈紝 浠ュ洓 锛堜簩 鐢插熀姘ㄥ熀锛 閽 锛 锛堬即锝 锛堬籍 锛堬迹锛 锛 锛 锛夊拰涓夌敳鍩洪摑 锛堬肌锝 锛堬迹锛 锛 锛 涓哄墠椹变綋锛 鍒跺锛达綁锛★綄锛ｏ籍钖勮啘銆 娴嬭瘯缁撴灉琛ㄦ槑锛 闅 锛 锛 锛 锛 锛 鐫€鍩哄簳娓╁害鐨勫崌楂橈紝 鑶滃眰鐨勬矇绉€熺巼鍗囬珮锛 鐢甸樆鐜囬檷浣庯紝 鍏夊甯﹂殭鐢憋紦矶帮紨锛 锝咃级 闄嶄綆鍒帮紥矶帮紣锛 锝咃级锛 骞跺湪鍩哄簳娓╁害涓猴紦锛愶紣鍜岋紦锛曪紣 鈩冩椂鍑虹幇浜嗗弻鍚告敹杈癸紱 鍩哄簳娓╁害涓猴紦锛曪紣 鈩冩椂锛 锛★綄 锛堬迹锛 锛 鍒嗚В锛 浣匡肌锝 锛 锛 杩涘叆鑶滃眰涓庯即锝夛籍鍜岋即锝夛迹褰㈡垚锛达綁锛★綄锛拰锛达綁锛★綄锛ｏ紱 鑶滃眰涓即锝夛籍鍜岋即锝夛迹鐨勫舰鎴愶紝 鍙互鏈夋晥鎶戝埗鑶滃眰鐨勮嚜鐒 姘у寲锛 鍩哄簳娓╁害涓猴紥锛曪紣鍜岋紦锛愶紣 鈩冩椂锛 钖勮啘涓烘棤瀹氬瀷缁撴瀯锛 褰撳熀搴曟俯搴︿负锛擄紩锛 鈩冩椂锛 鏈夛即锝夛籍 鏅朵綋浜 鐢燂紱 鑶滃眰鐨勮〃闈㈢矖绯欏害闅忕潃鍩哄簳娓╁害鐨勫崌楂樺厛闄嶄綆鍚庡崌楂橈紝 琛ㄩ潰绮楃硻搴︾殑鍗囬珮鍙兘鏄洜涓哄湪鍩哄簳 娓╁害涓猴紦锛曪紣 鈩冩椂鍓嶉┍浣撴潗鏂欑殑鍒嗚В锛 浣匡迹鈥旓绩閿繘鍏ヨ啘灞傛墍瀵艰嚧鐨勩€ 鍏抽敭璇嶏細 鐑師瀛愬眰娌夌Н锛 锛达綁锛★綄锛ｏ籍钖勮啘锛 鍏夊甯﹂殭锛 鍚告敹杈癸紱 鐢甸樆鐜 锛 锛 锛 涓浘鍒嗙被鍙凤細 锛达籍锛擄紣锛旐栋锛愶紩锛曘€€ 銆€ 鏂囩尞鏍囪瘑鐮侊細 锛°€€ 銆€ 鏂囩珷缂栧彿锛 锛戯紣锛愶紦 锛擄紩锛擄几 锛堬紥锛愶紤锛楋級 锛戯紣 锛愶紬锛曪紮 锛愶紪 锛帮綊锝忥綈锝咃綊锝旓綁锝咃綋 锝忥絾 锛达綁锛★綄锛ｏ籍 锛达綀锝夛綆 锛︼綁锝岋綅锝 锛э綊锝忥綏锝 锝傦綑 锛达綀锝咃綊锝嶏絹锝 锛★綌锝忥綅锝夛絻 锛絹锝欙絽锝 锛わ絽锝愶綇锝擄綁锝旓綁锝忥綆 锛达絽锝冿綀锝庯綁锝戯綍锝 锛癸絹锝庯絿 锛癸綇锝庯絿锝岋綁锝侊綆锝囷紝 锛綁 锛絹锛 锛ｏ綀锝咃綆 锛э綍锝侊綆锝囷綈锝夛綆锝囷紝 锛癸綍锝 锛綁 锛堬迹锝忥綄锝岋絽锝囷絽 锝忥絾 锛帮綀锝欙綋锝夛絻锝 锝侊綆锝 锛ワ綄锝咃絻锝旓綊锝忥綆锝夛絻 锛ワ綆锝囷綁锝庯絽锝咃綊锝夛綆锝囷紝 锛絹锝夛綄锝 锛碉綆锝夛綎锝咃綊锝擄綁锝旓綑锛 锛絹锝夛綄锝 锛曪紩锛栵紣锛戯紤锛 锛ｏ綀锝夛綆锝侊級 锛★絺锝擄綌锝掞絹锝冿綌锛 锛达綀锝 锛达綁锛★綄锛ｏ籍 锝旓綀锝夛綆 锝嗭綁锝岋綅锝擄綏锝咃綊锝 锝勶絽锝愶綇锝擄綁锝旓絽锝 锝忥綆 锛筹綁 锝侊綆锝 锛筹綁锛 锝擄綍锝傦綋锝旓綊锝侊綌锝咃綋 锝傦綑 锝旓綀锝咃綊锝嶏絹锝 锝侊綌锝忥綅锝夛絻 锝岋絹锝欙絽锝 锛 锝勶絽锝愶綇锝擄綁锝旓綁锝忥綆 锝旓絽锝冿綀锝庯綁锝戯綍锝咃綍锝擄綁锝庯絿锛达綁 锛堬籍 锛堬迹锛 锛