大型机件测距系统精度分析.pdfVIP

第 40 卷第 4 期 中南大学学报( 自然科学版) Vol.40 No.4 2009 年 8 月 Journal of Central South University (Science and Technology) Aug. 2009 大型机件测距系统精度分析 周秀云1，张 涛2 (1. 电子科技大学 自动化学院，四川成都，610054； 2. 四川大学 激光应用技术研究所，四川 成都，610065) 摘 要：为了提高无导轨大尺寸测量系统的精度，以具有较强稳定度和抗干扰能力的双纵模热稳频 He-Ne 激光器 为光源，采用数字滤波提高信噪比，利用小波变换具有空间局部化的特性和表征信号奇异性的能力，在适当尺度 下刻画大尺寸测量信号的过零点，进行小波锐化，以提高节点对准精度。研究结果表明：室外时拍频频率稳定度 −7 ；系统节点对准误差小于30 μm ；小波锐化能把双纵模无导轨大尺寸拍频干涉仪的测量精度从60 μm 提 可达 10 高到 30 μm 。 关键词：无导轨；精度；拍波；节点确定误差；小波变换 中图分类号：TH744.3 文献标识码：A 文章编号：1672−7207(2009)04−1022−06 Precision analysis of large-scale work ranger system ZHOU Xiu-yun1, ZHANG Tao2 (1. School of Automation Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China; 2. Institute of Applied Laser, Sichuan University, Chengdu 610065, China) Abstract: The frequency-stabilized He-Ne laser with thermoregulation was used as the light source, which operates on the double longitudinal modes, has high frequency stability and good anti-disturbance performance. Numeral filter was used to raise signal-to-noise. Using the wavelet transform with the characteristic of spatial localization and signal singularity detection ability, the local zero point of single from the large size measurement system were accurately detected on appropriate scale and edged. The precision of ranger of laser no-guide larger size was raised. Experiment results show that the beat-frequency stability can reach 10−7 in open air, error