离子束刻蚀制作用于红外焦平面探测器的面阵石英微透镜.pdf

18 2 Vol. 18, No. 2 1999 4 J. Infrared M illim . Waves April, 1999 - Large area Quartz Glass Microlens Array Fabricated by lon Beam Etching for Focal Plane Detectors ZHANG Xin -Yu YI Xin -Jian HE M iao ZHAO Xing-Ron g ( Dept. of Opto-Electronic Engineering, Huazhong Univer sity of Science , , 430074, ) Technology W uhan Hubei China Abstract: A large-area quar tz glass refractive microlens array mounted on a large-area focal- plane de tec ting architecture w as fabricated using a multiple-process, including pho- tolithography, hea reatmen , and argon ion beam etching . The experimental measurements - show tha he optical filling factor of the focal plane dtectors w ith refractive microlens array is more than 95% ( for square-based arch microlens) and 70% ( for spherical microlens) , respec- tively, the focal length of the square-based arch microlens and spherical microlens is abou 90m and 80m , respectively . Both the scanning electron microscope and the surface s tyle mea- suremen tw ere used to determine the dim ensions and the surface morphology of the microlens fabrica ted. The techniques utilized can be applied to fabricate microlens array of larger area. Key words: refractive microlens array, IR focal plane structure. Introduction A tpresent, large-area staring infrared ( IR) focal plane arrays ( FPAs ) have been used in many fields, such as IR astronomical im aging, industri