脉冲激光沉积法制备SrMnO3薄膜脉冲激光沉积法制备SrMnO3薄膜.pdf

Applied Physics 应用物理, 2015, 5, 1-7 Published Online January 2015 in Hans. /journal/app /10.12677/app.2015.51001 SrMnO3 Film Grown by Pulsed Laser Deposition * * Xin Lu, Rujun Tang , Hao Yang College of Physics, Optoelectronics and Energy of Soochow University, Suzhou * * Email: tangrj@, yanghao@ th st th Received: Dec. 16 , 2014; revised: Dec. 31 , 2014; accepted: Jan. 6 , 2015 Copyright © 2015 by authors and Hans Publishers Inc. This work is licensed under the Creative Commons Attribution International License (CC BY). /licenses/by/4.0/ Abstract Two-step method through solid state reaction is used to synthesize high purity single phase po- lycrystalline SrMnO3 target. Then we use Pulsed Laser Deposition to grow SrMnO3 films on SrTiO3(001) substrates, we have tried different temperatures of substrate and different oxygen pressures during our experiment. Results show that with deposition temperature above 700 de- gree and oxygen pressure around 5 Pa, SrMnO3 film will grow with good crystallinity. X-Ray dif- fraction and synchrotron radiation X-Ray diffraction are measured here to identify the crystal structure. Epitaxy between film and substrate is confirmed and the orientation between film and substrate is SrMnO (001)//SrTiO (001), also phi scan shows that at in plane there is no rotation 3 3 between film and substrate. X-ray photoelectron spectroscopy of Mn element reveal that in the film Mn have +3 and +4 two valence states, about 90 percentage of all the Mn are +4 valence.