基于介观压阻效应的gaas基微机械陀螺的仿真与设计-测试计量技术及仪器专业论文.docx

ThedesigningandsimulationoftheGaAsmicro—gyroscopebasedonmeso—piezoresistanceeffectAbstractAlongwiththedevelopmentofthemodemphysics，micro·electronics，computerandinertialtechnology,themicro-mechanicalmicro—gyroscope、析thitsuniquecharacteristicshasbecomeadevelopmenttrendforinertialsensorandit possessesagoodapplicationprospect．Butthesensitivityandminiaturizationofmicro—gyroscopeislimited bytraditionaldetectionmodesomeextent，thusnewmaterialsandnewmechanismappliedinthemicro—gyroscopeareurgentlyneeded．Meso-piezoresistanceeffectmeetstherequirementsofthedevelopmentofmicro—gyroscope．ItisexploredanovelNEMS---micro-gyroscopeGaAs-basedmicro—gyroscope，thesensitivityofmicro—gyroscopebasedontheGaAs／AIAsresonanttunneling、：film’meso—piezoresistance effectwill higher thantraditional detectionmode’micro-gyroscope．InthepaperAnsysfiniteelementsoftwareisusedtosimulateandtoanalysisthestructureofthemicro-gyroscope，somerelated dynamicsdata alealsogot．Thenonthebaseofthemeso-piezoresistanceeffect,thesensitivityofmicro—gyroscopeis calculated，certainimportantfactorswhichCaneffectthemicro·gyroscope’performancearediscussedtoo．Mainresearchthecontentsareasfollows：1Afteradvantagesanddisadvantagesofthefourtraditionaldetectionmodearediscussed，itishopedthatthehighersensitivityandlowertemperatureeffectwillrealizeifmicro·gyroscopeusesmeso—piezoresistanceeffectasdetectionmechanism．2、Accordingtothevibrationtheory,theAnsysfiniteelementsoftwareisusedtosolvethedrivingvibrationandthedetectionvibrationofthemicro-gyroscope，andtheresultthatwhenthemicro—gyroscopeisworkingangularvelocityrotatingonthez—axisisproportionaltothestrainonthemicro—beamisgained．3、Thequantummechanicsandthemeso·piezoresistancetheoryareusedtosimulatethemicro—gyroscope，andthevaluesofbiasvoltageontheresonantttmnelingfilmandthesensitivityofthemicro·gyroscopeareobtainedKeywords}micro·gyroscope，meso—piezoresistanceeffect，resonanttunneling，super-lattices，MEMS／NEMS原创性声明本人郑重声明：所呈交的学位论文，是本人在指导教师的指导下，独立进行研究所取得的成果。除文中已经注明引用的内容外，本论文不包含其他个人或集体已经发表或撰写过的科研成果。