伯克利课程 - MEMS设计 Introduction to MEMS design.ppt

Introduction to MEMS Design and Fabrication Kristofer S.J. Pister Berkeley Sensor and Actuator Center UC Berkeley A brief history of MEMS 1750s first electrostatic motors (Benjamin Franklin, Andrew Gordon) 1824 Silicon discovered (Berzelius) 1927 Field effect transistor patented (Lilienfield) 1947 invention of the transistor (made from germanium) 1954 Smith, C.S., Piezoresistive effect in Germanium and Silicon, Physical Review, 94.1, April 1954. 1958 silicon strain gauges commercially available 1961 first silicon pressure sensor demonstrated (Kulite) 1967 Invention of surface micromachining (Nathanson, Resonant Gate Transistor) 1970 first silicon accelerometer demonstrated (Kulite) 1977 first capacitive pressure sensor (Stanford) 1980 Petersen, K.E., Silicon Torsional Scanning Mirror, IBM J. RD, v24, p631, 1980. 1982 disposable blood pressure transducer (Foxboro/ICT, Honeywell, $40) 1982 active on-chip signal conditioning 1984? First polysilicon MEMS device (Howe, Muller ) 1988 Rotary electrostatic side drive motors (Fan, Tai, Muller) 1989 Lateral comb drive (Tang, Nguyen, Howe) 1991 polysilicon hinge (Pister, Judy, Burgett, Fearing) 1992 Grating light modulator (Solgaard, Sandejas, Bloom) 1992 MCNC starts MUMPS 1993? first surface micromachined accelerometer sold (Analog Devices, ADXL50) 1994 XeF2 used for MEMS (OK, so this one isn’t as important as the others) References Books Elwenspoek and Jansen, Silicon Micromachining, Cambridge Keller, Microfabricated High Aspect Ratio Silicon Flexures, MEMS Precision Instruments Kovacs, Micromachined Transducers Sourcebook, McGraw-Hill Madou, Fundamentals of Microfabrication, CRC Maluf, An Introduction to Microelectromechanical Systems Engineering, Artech House Ristic, Sensor Technology and Devices, Artec House Senturia, Microsystem Design, Kluwer Sze, Semiconductor Sensors, Wiley References Conferences Sensors and Actuators Workshop (Hilton Head), even years, Hilton Head Island, SC. N. America only IEEE MEMS workshop,